I hangaia e KYKY te huinga tuatahi mo te Turbo Molecular Pump, Kaihoko Helium Leak Detector me te Matawai i te Miihini Hiko i Hainamana.
I nga tau 1970, KYKY, peka SEM o KYKY i angitu te whakawhanake i te Miihini Miihini Tuatahi i ia China.
He kauhau mokowhiti mo te whakarite tauira SEM, kaore i te whakahaere tauira tauira.
Te hau waenga: te hau, te argon ranei, me te kokoru argon me te pikinga o te pikinga o te hau. He waatea kua whakaritea, hei tauira (me whakauru ki te mehua matotoru paninga)
Painga:
rahi iti; mahi ratarata-kaiwhakamahi; taunga ki te nuinga o te taumata maitai; Kei te waatea te argon
Whakatakotoranga:
Taimana Whare: | 75-150mm |
Punaha korehau | Panui Hurihuri mo te Whakaweto, 2L / s |
Tauanga Putunga: | 2-10 nm / min |
Mana: | 220V / 50Hz |
Ruma tukatuka karaihe | ∮100mm; 130mm Teitei. |
Tauira atamira tauira: | ∮40mm (Kia 6 nga ipu tauira) |
Rahinga whaainga koura: | ∮58mm * 0.12mm (matotoru) |
He kitenga korehau: | Ngakau Pirani |
Tiaki korehau: | 20 paa me te hiko pikinga ngaruiti |
Gas Waenganui: | Argon hau ranei me te hau argon ki te tomokanga o te hau motuhake me te hau e whakahaere ana i te miihiniiti. |
Nga tono:
Tauira tauira mo te tirotiro karahiko (e ahei ana ki te piu, te koura. Te hiriwa, te parahi, te titanium me te konumohe.)